Thin-film piezoelectric MEMS transducer suitable for middle-ear audio prostheses

  1. Campanella, H.
  2. Camargo, C.J.
  3. López Garcia, J.
  4. Daza, A.
  5. Urquiza, R.
  6. Esteve, J.
Journal:
Journal of Microelectromechanical Systems

ISSN: 1057-7157

Year of publication: 2012

Volume: 21

Issue: 6

Pages: 1452-1463

Type: Article

DOI: 10.1109/JMEMS.2012.2211571 GOOGLE SCHOLAR

Sustainable development goals

info

SDG classification obtained using Aurora SDG artificial intelligence model.